Tridimensional characterization of voids in self-annealed implanted silicon using electron holography
1997
Details
Title
Tridimensional characterization of voids in self-annealed implanted silicon using electron holography
Author(s)
Beeli, C ; Matteucci, G ; Migliori, A ; Lulli, G ; Merli, PG
Published in
Helvetica Physica Acta
Volume
70
Pages
3-4
Date
1997
Other identifier(s)
View record in Web of Science
Laboratories
CIME
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > CIME - Interdisciplinary Center for Electron Microscopy
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2007-02-15