000100488 001__ 100488
000100488 005__ 20181203020737.0
000100488 02470 $$2ISI$$aA1993LE95200099
000100488 037__ $$aARTICLE
000100488 245__ $$aPhysical properties of semi-insulating polycrystalline silicon. I. Structure, electronic properties, and electrical conductivity
000100488 269__ $$a1993
000100488 260__ $$c1993
000100488 336__ $$aJournal Articles
000100488 700__ $$aBruesch, P
000100488 700__ $$aStockmeier, T
000100488 700__ $$aStucki, F
000100488 700__ $$0240619$$aBuffat, PA$$g104664
000100488 773__ $$j73$$q7677-7689$$tJ. Appl. Phys.
000100488 909C0 $$0252025$$pCIME$$xU10192
000100488 909CO $$ooai:infoscience.tind.io:100488$$pSB$$particle
000100488 937__ $$aCIME-ARTICLE-1993-007
000100488 970__ $$a251/CIME
000100488 973__ $$aEPFL$$rREVIEWED$$sPUBLISHED
000100488 980__ $$aARTICLE