Loading...
conference paper
High resolution electron microscopy of ion implanted and annealed silicon
Cullis, AG
•
Hutchinson, JL
1989
Microscopy of Semiconducting Materials. Proceedings of the Royal Microscopical Society Conference
Type
conference paper
Authors
Editors
Cullis, AG
•
Hutchinson, JL
Publication date
1989
Published in
Microscopy of Semiconducting Materials. Proceedings of the Royal Microscopical Society Conference
ISBN of the book
0-85498-056-3
Series title/Series vol.
Institute of Physics Conference Series; 100
Start page
39
End page
44
Peer reviewed
REVIEWED
EPFL units
Event name | Event place | Event date |
Oxford University | 10-13 April 1989 | |
Available on Infoscience
February 15, 2007
Use this identifier to reference this record