High resolution electron microscopy of ion implanted and annealed silicon
1989
Details
Title
High resolution electron microscopy of ion implanted and annealed silicon
Author(s)
Ruterana, P ; Stadelmann, PA ; Buffat, PA
Published in
Microscopy of Semiconducting Materials. Proceedings of the Royal Microscopical Society Conference
Editor(s)
Series
Institute of Physics Conference Series, 100
Pages
39-44
Conference
Royal Microscopical Society Conference, Oxford University, 10-13 April 1989
Date
1989
ISBN
0-85498-056-3
Laboratories
CIME
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > CIME - Interdisciplinary Center for Electron Microscopy
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-02-15