High resolution electron microscopy of ion implanted and annealed silicon


Published in:
Microscopy of Semiconducting Materials. Proceedings of the Royal Microscopical Society Conference, 39-44
Presented at:
Royal Microscopical Society Conference, Oxford University, 10-13 April 1989
Year:
1989
Laboratories:




 Record created 2007-02-15, last modified 2018-03-17


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