Morphology and structure of thin TiSi/sub 2/ films on silicon
1989
Details
Title
Morphology and structure of thin TiSi/sub 2/ films on silicon
Author(s)
Catana, A ; Heintze, M ; Lévy, F ; Schmid, PE ; Stadelmann, PA
Published in
Semiconductor Silicon. Materials Science and Technology. Proceedings of the Summer School.
Date
1989
Laboratories
CIME
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > CIME - Interdisciplinary Center for Electron Microscopy
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-02-15