000100407 001__ 100407
000100407 005__ 20181203020722.0
000100407 037__ $$aARTICLE
000100407 245__ $$aEffect ion energy and object temperature on thinning by ion bombardment of GaAs
000100407 269__ $$a1988
000100407 260__ $$c1988
000100407 336__ $$aJournal Articles
000100407 700__ $$aSpycher, R
000100407 700__ $$aSchmid, F
000100407 700__ $$g104664$$aBuffat, PA$$0240619
000100407 773__ $$j61$$thelvetica physica acta$$k6$$q853-6
000100407 909C0 $$xU10192$$0252025$$pCIME
000100407 909CO $$pSB$$particle$$ooai:infoscience.tind.io:100407
000100407 937__ $$aCIME-ARTICLE-1988-010
000100407 970__ $$a479/CIME
000100407 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000100407 980__ $$aARTICLE