000100407 001__ 100407
000100407 005__ 20181203020722.0
000100407 037__ $$aARTICLE
000100407 245__ $$aEffect ion energy and object temperature on thinning by ion bombardment of GaAs
000100407 269__ $$a1988
000100407 260__ $$c1988
000100407 336__ $$aJournal Articles
000100407 700__ $$aSpycher, R
000100407 700__ $$aSchmid, F
000100407 700__ $$0240619$$aBuffat, PA$$g104664
000100407 773__ $$j61$$k6$$q853-6$$thelvetica physica acta
000100407 909C0 $$0252025$$pCIME$$xU10192
000100407 909CO $$ooai:infoscience.tind.io:100407$$pSB$$particle
000100407 937__ $$aCIME-ARTICLE-1988-010
000100407 970__ $$a479/CIME
000100407 973__ $$aEPFL$$rREVIEWED$$sPUBLISHED
000100407 980__ $$aARTICLE