Investigation of epitaxial titanium silicide thin films by high resolution electron microscopy
1987
Details
Title
Investigation of epitaxial titanium silicide thin films by high resolution electron microscopy
Author(s)
Catana, A ; Heintze, M ; Schmid, PE ; Stadelmann, PA
Published in
Microscopy of Semiconducting Materials. Proceedings of the Institute of Physics Conference (IOP)
Volume
xvi
Pages
529-534
Date
1987
Other identifier(s)
View record in Web of Science
Laboratories
CIME
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > CIME - Interdisciplinary Center for Electron Microscopy
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-02-15