Interfacial structure of titanium silicide films on silicon
1987
Details
Title
Interfacial structure of titanium silicide films on silicon
Author(s)
Catana, A ; Heintze, M ; Lévy, F ; Schmid, PE ; Stadelmann, PA
Published in
18th International Conference on the Physics of Semiconductors
Volume
1
Issue
2
Pages
327-330
Date
1987
Publisher
World Scientific
Laboratories
CIME
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > CIME - Interdisciplinary Center for Electron Microscopy
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2007-02-15