Interfacial structure of titanium silicide films on silicon


Published in:
18th International Conference on the Physics of Semiconductors, 1, 2, 327-330
Year:
1987
Publisher:
World Scientific
Laboratories:




 Record created 2007-02-15, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)