Correlation between process conditions, chemical composition and morphology of MoS2 films prepared by RF planar magnetron sputtering
1986
Details
Title
Correlation between process conditions, chemical composition and morphology of MoS2 films prepared by RF planar magnetron sputtering
Author(s)
Bichsel, R ; Buffat, PA ; Lévy, F
Published in
Journal of Physics D: Applied Physics
Volume
19
Pages
1575-1585
Date
1986
Other identifier(s)
View record in Web of Science
Laboratories
CIME
Record Appears in
Scientific production and competences > SB - School of Basic Sciences > CIME - Interdisciplinary Center for Electron Microscopy
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2007-02-15