Surface microfabricated SU-8 devices with integrated electrodes for scanning probe microscopy

We report here on a new method to release functional SU-8 micro-components with embedded and integrated metal electrodes from the surface, based on isotropic SF6 dry etching of a poly-silicon sacrificial layer. This new fast and clean release technique allows a reproducible fabrication of SU-8 structures with integrated metal devices without risk of damage or altering their performance.


Presented at:
Eurosensors XIX, 19th European conference on Solid-State Transducers, Barcelona, Spain, 11-14 Sept, 2005
Year:
2005
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2007-02-08, last modified 2018-03-17

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