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  4. Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation
 
research article

Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation

Piot, Adrien
•
Pribosek, Jaka
•
Maufay, Jordan
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April 1, 2021
Journal of Microelectromechanical Systems

This paper presents a systematic approach to transduction optimization of resonant piezo-based MEMS devices. The method is based on inverse design approach using direct piezoelectric effect and exploits mechanical action of desired mode to calculate the polarization map of the piezoelectric ceramics. Optimal transduction is achieved by matching the excited electric field distribution to the inversely retrieved polarization map using the electrode segmentation and topology optimization technique. The proposed method was applied to improve the design of existing state-of-the-art piezoelectric MEMS mirrors. The optimized devices feature 70% increase in the optical scan angle (theta(opt)) as well as 47 % reduction in power consumption compared to original design. At the same optical scan angle, the optimized devices required 2.28-fold less driving voltage amplitude.

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Type
research article
DOI
10.1109/JMEMS.2021.3054357
Web of Science ID

WOS:000638400700006

Author(s)
Piot, Adrien
Pribosek, Jaka
Maufay, Jordan
Schicker, Johannes
Tortschanoff, Andreas
Matloub, Ramin  
Muralt, Paul  
Moridi, Mohssen
Date Issued

2021-04-01

Publisher

Institute of Electrical and Electronics Engineers

Published in
Journal of Microelectromechanical Systems
Volume

30

Issue

2

Start page

216

End page

223

Subjects

Engineering, Electrical & Electronic

•

Nanoscience & Nanotechnology

•

Instruments & Instrumentation

•

Physics, Applied

•

Engineering

•

Science & Technology - Other Topics

•

Instruments & Instrumentation

•

Physics

•

electrodes

•

optimization

•

piezoelectric polarization

•

micromechanical devices

•

resonant frequency

•

micromirrors

•

systematics

•

1d

•

electrodes

•

micromirror

•

piezoelectric

•

pzt

•

segmentation

•

transduction

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
CIME  
Available on Infoscience
May 22, 2021
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/178212
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