conference paper
Tunable Electromechanical Resonator Based On Carbon Nanotube Array Suspended Gate Field Effect Transistor (Cnt-Sgfet)
2010
MEMS 2010: 23rd IEEE International Conference On Micro Electro Mechanical Systems, Technical Digest
In this paper we report the first experimental demonstration of Micro-Electro-Mechanical resonator based on a Carbon Nanotube-Array-Suspended-Gate-Field-Effect-Transistor (CNT-SGFET). A dense array of single-walled CNT aligned by ac-dielectrophoresis technique forms the suspended gate electrode of a conventional silicon based FET. Resonance frequency of 120 MHz is reported. An equivalent electrical model has been developed for the resonator.
Type
conference paper
Web of Science ID
WOS:000278416400026
Author(s)
Arun, A.
Goffman, M. F.
Grogg, D.
Filoramo, A.
Campidelli, S.
Derycke, V.
Idda, T.
Salet, P.
Date Issued
2010
Published in
MEMS 2010: 23rd IEEE International Conference On Micro Electro Mechanical Systems, Technical Digest
Series title/Series vol.
Proceedings: IEEE Micro Electro Mechanical Systems
Start page
112
End page
115
Editorial or Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Hong Kong, PEOPLES R CHINA | Jan 24-28, 2010 | |
Available on Infoscience
January 9, 2012
Use this identifier to reference this record