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  4. Low-Cost Readout Electronics for Piezoresistive MEMS-Based Transducers
 
conference paper

Low-Cost Readout Electronics for Piezoresistive MEMS-Based Transducers

Barrettino, Diego  
•
Ferreira, Denis
•
Mattavelli, Marco  
January 1, 2019
2019 Ieee International Instrumentation And Measurement Technology Conference (I2Mtc)
IEEE International Instrumentation and Measurement Technology Conference (I2MTC)

The designs fabrication and testing of low-cost readout electronics for piezoresistive MEMS-based transducers are presented in this paper. The proposed circuit architecture has a low input referred noise power spectral density of 60nV/root Hz a latency of 2.5 mu s and provides offset compensation with a resolution of 72 mu V for piezoresistive MEMS-based transducers such as microcantilevers and micromembranes. Measurement results performed with a microcantilever used for force measurements and a micromembrane used for pressure measurements show the excellent performance of the proposed readout electronics for a frequency range from 10Hz to 9.6kHz.

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Type
conference paper
DOI
10.1109/I2MTC.2019.8826916
Web of Science ID

WOS:000568630900282

Author(s)
Barrettino, Diego  
Ferreira, Denis
Mattavelli, Marco  
Date Issued

2019-01-01

Publisher

IEEE

Publisher place

New York

Published in
2019 Ieee International Instrumentation And Measurement Technology Conference (I2Mtc)
ISBN of the book

978-1-5386-3460-8

Series title/Series vol.

IEEE Instrumentation and Measurement Technology Conference

Start page

1597

End page

1601

Subjects

Engineering, Electrical & Electronic

•

Instruments & Instrumentation

•

Engineering

•

Instruments & Instrumentation

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
SCI-STI-MM  
Event nameEvent placeEvent date
IEEE International Instrumentation and Measurement Technology Conference (I2MTC)

Auckland, NEW ZEALAND

May 20-23, 2019

Available on Infoscience
October 1, 2020
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/172036
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