conference paper
Optical MEMS based on silicon-on-insulator (SOI) for monolithic microoptics
2002
LEOS 2002 IEEE Annual Meeting Conference Proceedings
Type
conference paper
Author(s)
Date Issued
2002
Published in
LEOS 2002 IEEE Annual Meeting Conference Proceedings
Volume
2
Start page
580
End page
581
Written at
OTHER
Available on Infoscience
April 22, 2009
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