conference paper
Optical Ring Resonators in Sputtered Aluminum Nitride on Insulator for Integrated Photonic MEMS
2024
International Conference on Optical MEMS and Nanophotonics
This study explores the utilization of sputtered aluminum nitride (AlN) thin film on insulator as a platform for integrated photonic MEMS. We experimentally demonstrate proof-of-concept photonic ring resonators with Q-factors up to 31000 at a resonance wavelength of 1.5795 μm.
Type
conference paper
Scopus ID
2-s2.0-85206196641
Author(s)
Spettel, Jasmin
Silicon Austria Labs GmbH
Andrianov, Nikolai
SAL
Dubois, Florian
SAL
École Polytechnique Fédérale de Lausanne
Azeem, Munir Syed
SAL
Cassese, Tommaso
SAL
Moridi, Mohssen
SAL
École Polytechnique Fédérale de Lausanne
Quack, Niels
The University of Sydney
Dao, Thang Duy
SAL
Date Issued
2024
Publisher
Published in
International Conference on Optical MEMS and Nanophotonics
ISBN of the book
9798350384925
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
| Event name | Event acronym | Event place | Event date |
San Sebastian, Spain | 2024-07-28 - 2024-08-01 | ||
| Funder | Funding(s) | Grant Number | Grant URL |
FEEI | |||
Styrian Business Promotion Agency | |||
EPFL Center of MicroNanoTechnology | |||
| Show more | |||
Available on Infoscience
January 26, 2025
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