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  4. Double gate movable body Micro-Electro-Mechanical FET as hysteretic switch: Application to data transmission systems
 
conference paper

Double gate movable body Micro-Electro-Mechanical FET as hysteretic switch: Application to data transmission systems

Grogg, D.
•
Meinen, C.
•
Tsamados, D.
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2008
Solid-State Device Research Conference, 2008. ESSDERC 2008. 38th European

This paper reports on the fabrication, experimental characterization and data transmission application of a double-gate movable body FET. As its name suggests, the proposed movable-body Micro-Electro-Mechanical FET (MB-MEMFET) is a hybrid MEMS-semiconductor device that, in contrast with previously reported Suspended-Gate MOSFET, has a movable body separated by nano-size air gaps from two lateral fixed gates. We report here on the unique abrupt hysteretic characteristic of MB-MEMFET, which for our design offer reproducibility after intense cycling and, due to double gate architecture, a multi-level tunable hysteresis. Based on the $I_D-V_G$ hysteretic behavior of the new hybrid device we report for the first time a FSK circuit exploiting oscillation at two selectable frequencies (26 kHz and 14 kHz) used to transmit numerical data, which demonstrates the potential of the MB-MEMFET for applications in data transmission systems.

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Type
conference paper
DOI
10.1109/ESSDERC.2008.4681758
Web of Science ID

WOS:000262973300072

Author(s)
Grogg, D.
Meinen, C.
Tsamados, D.
Tekin, H. C.
Kayal, M.  
Ionescu, A. M.  
Date Issued

2008

Published in
Solid-State Device Research Conference, 2008. ESSDERC 2008. 38th European
Start page

302

End page

305

Subjects

data communication

•

field effect transistor switches

•

frequency shift keying

•

hysteresis

•

microswitches

•

FSK circuit

•

data transmission systems

•

double gate movable body micro-electro-mechanical FET

•

frequency 14 kHz

•

frequency 26 kHz

•

hybrid MEMS-semiconductor device

•

hysteretic switch

•

multi-level tunable hysteresis

•

oscillation

Editorial or Peer reviewed

REVIEWED

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Available on Infoscience
July 15, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/41328
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