conference paper
A high-cooperativity, nano-optomechanical system comprised of high stress Si3N4
January 1, 2021
2021 Conference On Lasers And Electro-Optics (Cleo)
We report the design fabrication and characterization of a monolithic nano-optomechanical transducer comprised of high stress silicon nitride (Si3N4). Our system features a one dimensional Fabry-Perot photonic crystal cavity (Q approximate to 10(5)) integrated with a high-Q (Q approximate to 10(6)) nanobeam resonator with optomechanical cooperativity of C-0 = 23. (c) 2021TheAuthor(s)
Type
conference paper
Web of Science ID
WOS:000831479801272
Author(s)
Date Issued
2021-01-01
Publisher
Publisher place
New York
Published in
2021 Conference On Lasers And Electro-Optics (Cleo)
ISBN of the book
978-1-943580-91-0
Series title/Series vol.
Conference on Lasers and Electro-Optics
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
ELECTR NETWORK | May 09-14, 2021 | |
Available on Infoscience
September 12, 2022
Use this identifier to reference this record