Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Nano-gap micro-electro-mechanical bulk lateral resonators with high quality factors and low motional resistances on thin silicon-on-insulator
 
research article

Nano-gap micro-electro-mechanical bulk lateral resonators with high quality factors and low motional resistances on thin silicon-on-insulator

Badila-Ciressan, N. D.  
•
Mazza, M.  
•
Grogg, D.
Show more
2008
Solid-State Electronics

The design, fabrication and experimental investigation of 22-25 MHz fragmented-membrane MEM bulk lateral resonators (BLR) with 100 nm air-gaps on thin (1 and 6 [mu]m) silicon-on-insulator (SOI) are reported. Quality factors as high as 120,000 and motional resistances of as little as 60 k[Omega] are measured under vacuum at room temperature, with 12 V DC bias and low AC power. The temperature influence on the resonance frequency and quality factor is studied and discussed between 80 K and 320 K. Significant quality factor increase and motional resistance reduction are reported at cryogenic temperature. The paper shows that high-quality factor MEM resonators can be integrated on partially depleted thin SOI, which can be a substrate of choice for the fabrication of future integrated hybrid MEMS-CMOS integrated circuits for communication applications.

  • Details
  • Metrics
Type
research article
DOI
10.1016/j.sse.2008.04.022
Web of Science ID

WOS:000259688300021

Author(s)
Badila-Ciressan, N. D.  
Mazza, M.  
Grogg, D.
Ionescu, A. M.  
Date Issued

2008

Published in
Solid-State Electronics
Volume

52

Issue

9

Start page

1394

End page

1400

URL

URL

internal-pdf://Nano-gap micro-electro-1303598592/Nano-gap micro-electro-mechanical bulk lateral resonators with high quality factors and low motional resistances on thin silicon-on-insulator.PDF
Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Available on Infoscience
January 8, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/45150
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés