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research article

Integration of MOX gas sensors on polyimide hotplates

Briand, D.  
•
Colin, S.
•
Courbat, J.  
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2007
Sensors and Actuators A: Physical

In this communication, we report on the integration of metal-oxide gas sensors on polymeric micro-hotplates made on polyimide and silicon substrates. Low-power consumption micro-hotplates with platinum electrodes and heaters were fabricated on polyimide membranes. Their thermal behavior was optimized using temperature probing at the micro-scale level coupled with thermal simulations. Tin oxide thick films were successfully integrated on these polyimide micro-hotplates using the drop coating technique. The annealing process of the tin oxide drops on the polyimide substrate was investigated and gas measurements are presented. Compared to the polyimide hotplates on silicon substrates, the hotplates made on polyimide sheets are simpler to process and more robust, and therefore, they are more suitable for the integration of metal-oxide films. Finally, a wafer level packaging technique using multiple polyimide layers was developed and led to a polymeric platform for metal oxide sensors. The technology is also promising for the integration of polyimide humidity sensors, of resistive and capacitive gas-sensitive polymeric films to realise fully flexible gas sensor arrays. © 2007 Elsevier B.V. All rights reserved.

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Type
research article
DOI
10.1016/j.snb.2007.09.013
Author(s)
Briand, D.  
Colin, S.
Courbat, J.  
Raible, S.
Kappler, J.
de Rooij, N. F.  
Date Issued

2007

Published in
Sensors and Actuators A: Physical
Volume

130

Start page

430

End page

435

Note

419

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39060
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