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conference paper

Fabrication of polysilicon gated-nanowires and their application for pA precision current measurements

Ecoffey, S. 
•
Pott, V. 
•
Bouvet, D. 
more
2005
Digest of Technical Papers of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05)
13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05)
Type
conference paper
DOI
10.1109/SENSOR.2005.1496553
Web of Science ID

WOS:000232189100210

Authors
Ecoffey, S. 
•
Pott, V. 
•
Bouvet, D. 
•
Leblebici, Y. 
•
Declercq, M. J. 
•
Ionescu, A. M. 
Publication date

2005

Published in
Digest of Technical Papers of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05)
Volume

1

Start page

859

End page

862

Peer reviewed

REVIEWED

EPFL units
NANOLAB 
LSM 
Event nameEvent placeEvent date
13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05)

Seoul, Korea

June 5-9

Available on Infoscience
December 6, 2005
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/220813