conference paper
A study of epitaxial piezoelectric thin films grown on silicon for energy scavenging applications
2008
PowerMEMS 2008
Type
conference paper
Author(s)
Gariglio, S.
Sambri, A.
Stucki, N.
Triscone, J.-M.
Guy, F.
Reiner, J. W.
Ahn, C. H.
Date Issued
2008
Published in
PowerMEMS 2008
Start page
269
End page
272
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
| Event name | Event place | Event date |
Sendai | November 9-12, 2008 | |
Available on Infoscience
May 12, 2009
Use this identifier to reference this record