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conference paper
Large linear micromirror array for UV femtosecond laser pulse shaping
2008
Proceedings of the IEEE/LEOS International Conference on Optical MEMS and Nanophotonics
We are fabricating a bulk-micromachined micromirror device for laser pulse shaping applications on femtosecond time scales. An array of micromirrors is used to individually retard or diminish certain laser frequencies spanning from the UV to the near-infrared. The individual mirrors are fixed by two springs on either side and can be tilted (amplitude modulation)or moved out-of plane (phase modulation) using asymmetrical or symmetrical vertical comb drives, respectively.
Type
conference paper
Authors
Waldis, S.
•
Weber, S.M.
•
Noell, N.
•
Extermann, J.
•
Kiselev, D.
•
Bonacina, L.
•
Wolf, J.P.
•
Publication date
2008
Published in
Proceedings of the IEEE/LEOS International Conference on Optical MEMS and Nanophotonics
Volume
1
Start page
39
End page
40
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Event name | Event place | Event date |
Freiburg | August 11-18, 2008 | |
Available on Infoscience
January 21, 2010
Use this identifier to reference this record