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book part or chapter
Atomic dynamics during silicon oxidation
Type
book part or chapter
Authors
Publication date
2001
Published in
Fundamental Aspects of Silicon Oxidation
Start page
107
End page
125
Series title/Series vol.
Springer Series in Materials Science; 46
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
October 8, 2009
Use this identifier to reference this record