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Villanueva, L. G., Vazquez-Mena, O., Montserrat, J., Savu, V., Sidler, K., Bausells, J., & Brugger, J. (2009). All through stencil MOSFET fabrication [Conference Presentation]. Fall meeting of the American Vacuum Society (AVS), San Jose, CA, USA, 2009. https://infoscience.epfl.ch/handle/20.500.14299/93878

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