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conference paper
Optical, Electrical and Mechanical Properties of the Tantalum Oxynitride Thin Films Deposited by Pulsing Reactive Gas Sputtering
2006
ICMCTF International Conference on Metallurgical Coatings and Thin Films
Type
conference paper
Authors
Publication date
2006
Published in
ICMCTF International Conference on Metallurgical Coatings and Thin Films
Start page
91
Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record