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conference paper
Electron beam induced deposition of metallic tips and wires for microelectronics applications
1999
Micro- and Nano Engineering MNE99
Type
conference paper
Authors
Publication date
1999
Published in
Micro- and Nano Engineering MNE99
Subjects
Note
JUN
MICROELECTRON ENG
EPFL units
Available on Infoscience
July 20, 2009
Use this identifier to reference this record