research article
Surface Micromachining
Cite this item
Linder, C., Paratte, L., Grétillat, M.-A., Jaecklin, V. P., & de Rooij, N. F. (1992). Surface Micromachining. Journal of Micromechanics and Microengineering, 2, 122–132. https://doi.org/10.1088/0960-1317/2/3/003
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Type
research article
Author(s)
Date Issued
1992
Published in
Volume
2
Start page
122
End page
132
Note
63
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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