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conference paper
Holographic photolithography for submicron VLSI structures
1989
Holographic Systems, Components and Applications, Bath, UK
Type
conference paper
Authors
Publication date
1989
Published in
Holographic Systems, Components and Applications, Bath, UK
Series title/Series vol.
Conference Publication No. 311
Start page
127
End page
132
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record