Micromechanical testing of SU-8 cantilevers
SU-8 is a photoplastic polymer with a wide range of possible applications in microtechnology. Cantilevers designed for atomic force microscopes were fabricated in SU-8. The mechanical properties of these cantilevers were investigated using two microscale testing techniques: contact surface profilometer beam deflection and static load deflection at a point on the beam using a specially designed test machine. The SU-8 Young's modulus value from the microscale test methods is approximately 2-3 GPa.
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Hopcroft, M., Kramer, T., Kim, G., Takashima, K., Higo, Y., Moore, D., & Brugger, J. (2005). Micromechanical testing of SU-8 cantilevers. Fatigue and Fracture of Engineering Materials and Structures, 28(8), 735–742. https://doi.org/10.1111/j.1460-2695.2005.00873.x
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