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  4. Interferometer Scanning Mirror Mechanism
 
conference paper

Interferometer Scanning Mirror Mechanism

Onillon, Emmanuel
•
Henein, Simon  
•
Theurillat, Patrick
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2002
IFAC Proceedings Volumes
2nd IFAC Conference on Mechatronic Systems

The CSEM has developed an optomechanical linear scanner. This scanner has a limited displacement range, performed with high resolution. The resolution is obtained through a very high precision motion guiding of the scanner itself. This paper describes the main features of the scanner system as well as its control system. After a complete description of the system, a state space model derived from the mechanical and electrical equations of the system is introduced. This model will be used for the design of a state space controller based on a pole placement algorithm, to make the system behave as a fourth order Bessel filter. To better track the desired reference trajectory, a feedforward will be added to the controller.

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2002_Interferometer scanning mirror mechanism_IFAC Publications.pdf

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http://purl.org/coar/version/c_970fb48d4fbd8a85

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