Assembly of Silicon Nitride Channels
Fabrication of silicon based micro-channels is typically a complex process involving multiple steps such as lithography, bonding, thin film deposition, etching, surface migration etc. We present a method for the fabrication of microchannels . insired by 2D material transferring techniques, we transfer a 100 nm thick silicon nitride film on top of a silicon nitride coated chip with predefined trenches and holes to form silicon nitride microchannels and membranes.
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Larsen, T., Moreno, C. C., & Vazquez-Mena, O. (2017). Assembly of Silicon Nitride Channels. Micro and Nano Engineering (MNE) 2017, Braga, Portugal, 18 C.E. https://infoscience.epfl.ch/handle/20.500.14299/144236
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