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research article
Process optimization for the sputter deposition of molybdenum thin films as electrode for AlN thin films
Type
research article
Web of Science ID
WOS:000239048100009
Authors
Publication date
2006
Published in
Volume
24
Issue
4
Start page
946
End page
952
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
October 18, 2007
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