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  4. Enhanced mobility of hydrogenated MO-LPCVD ZnO contacts for high performances thin film silicon solar cells
 
conference paper

Enhanced mobility of hydrogenated MO-LPCVD ZnO contacts for high performances thin film silicon solar cells

Ding, L.
•
Benkhaira, M.
•
Nicolay, S.
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2012
MRS Proceedings

In this contribution, we study the increase in metalorganic-low pressure chemical vapor deposited (MO-LPCVD) ZnO thin films conductivity by hydrogen plasma post-treatment. We show that this improvement is linked to defect passivation at grain boundaries, decreasing the electron traps density and resulting in the almost complete suppression of the electron scattering at grain boundaries. For a 2 μm thick non-intentionally doped ZnO layer, electron mobility reaches after treatment values close to 60 cm2V-1s-1 (corresponding to an increase of 100%), with a carrier density still as low as 3 x1019 cm-3 (+1.5 x1019 cm-3). Such layers have an absorbance below 2-3% in the range of 400 to 1100 nm making them among the most transparent and conductive materials reported so far. In addition, we demonstrate that hydrogen plasma posttreated ZnO layers can be used as front electrode for producing highly transparent and conductive electrodes. Eventually, it is shown that hydrogen plasma treatment can also be used on the complete thin film solar cell stack (back contact and silicon device) to improve the cell performances.

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Type
conference paper
DOI
10.1557/opl.2012.808
Author(s)
Ding, L.
Benkhaira, M.
Nicolay, S.
Ballif, C.  
Date Issued

2012

Published in
MRS Proceedings
Volume

1426

Start page

51

End page

56

Note

IMT-NE Number: 681

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
PV-LAB  
Available on Infoscience
December 20, 2012
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/87530
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