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research article

Fabrication of clamped-clamped beam resonators with embedded fluidic nanochannel

Scaiola, Davide  
•
Stassi, Stefano
•
Calmo, Roberta
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July 15, 2020
Microelectronic Engineering

Suspended nanochannel resonators (SNRs) are promising devices able to characterize mass down to the attogram scale, thus being able to detect nanoparticles or biomolecules. In this paper, we present a flexible fabrication process for SNRs based on a sacrificial layer approach that allows to easily tailor the dimensions of the nanochannel by changing the thickness of the sacrificial layer or its patterning during the lithographic step. The resonance properties of the fabricated SNR are investigated in terms of resonance frequency and frequency stability (Allan deviation). Liquids of different densities are injected in the device and, from the shift of the resonance peaks, the mass responsivity of the resonators is assessed to be up to 3.90 mHz/ag. To the best of our knowledge, the devices here presented are the first example of suspended nanochannel resonators with a channel height as low as 50 nm fabricated with a top-down approach.

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Type
research article
DOI
10.1016/j.mee.2020.111395
Web of Science ID

WOS:000566713600014

Author(s)
Scaiola, Davide  
•
Stassi, Stefano
•
Calmo, Roberta
•
Maillard, Damien  
•
Varricchio, Stefano S. G.  
•
De Pastina, Annalisa  
•
Villanueva, Guillermo  
•
Renaud, Philippe  
•
Ricciardi, Carlo
Date Issued

2020-07-15

Publisher

ELSEVIER

Published in
Microelectronic Engineering
Volume

231

Article Number

111395

Subjects

Engineering, Electrical & Electronic

•

Nanoscience & Nanotechnology

•

Optics

•

Physics, Applied

•

Engineering

•

Science & Technology - Other Topics

•

Optics

•

Physics

•

suspended nanochannel resonator

•

nanofabrication

•

mass sensor

•

nems

•

limits

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS4  
NEMS  
Available on Infoscience
September 20, 2020
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/171806
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