conference paper
Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform
January 1, 2021
2021 Ieee 17Th International Conference On Group Iv Photonics (Gfp 2021)
The thermal motion of a vacuum packaged, suspended nano-beam and nanophotonic waveguide on a silicon photonics-MEMS platform is measured. The resonance frequency and Q-factor of the observed mechanical modes are determined. We also experimentally estimate the displacement sensitivity to be 1.779 +/- 0.022 fm/root Hz.
Type
conference paper
Web of Science ID
WOS:000783824500029
Author(s)
Rajendran, Khannan
Pandey, Awanish
Edinger, Pierre
Jo, Gaehun
Khan, Umar
Verheyen, Peter
Niklaus, Frank
Bogaerts, Wim
Date Issued
2021-01-01
Publisher
Publisher place
New York
Published in
2021 Ieee 17Th International Conference On Group Iv Photonics (Gfp 2021)
ISBN of the book
978-1-6654-2224-6
Series title/Series vol.
IEEE International Conference on Group IV Photonics
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
| Event name | Event place | Event date |
ELECTR NETWORK | Dec 07-10, 2021 | |
Available on Infoscience
May 23, 2022
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