research article

Microhotplates with TiN heaters

Creemer, J.F.
•
Briand, D.  
•
Zandbergen, H.W.
Show more
2008
Sensors and Actuators A: Physical
Type
research article
DOI
10.1016/j.sna.2008.08.016
Author(s)
Creemer, J.F.
Briand, D.  
Zandbergen, H.W.
van der Vlist, W.
de Boer, C.R.
de Rooij, N.F.  
Sarro, P.M.
Date Issued

2008

Published in
Sensors and Actuators A: Physical
Volume

148

Start page

416

End page

421

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Available on Infoscience
November 9, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/44094