book part or chapter
Conducting thin films of ruthenium oxide prepared by MOCVD
1998
Materials Research Society Symposium Proceedings
Type
book part or chapter
Web of Science ID
WOS:000077430000087
Author(s)
Date Issued
1998
Published in
Materials Research Society Symposium Proceedings
Start page
479
End page
484
Volume
514
Issue
Advanced Interconnects and Contact Materials and Processes for Future Integrated Circuits
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
February 21, 2006
Use this identifier to reference this record