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research article

Optical characterization of high numerical aperture microlenses for quality assessment and fabrication process optimization

Beguelin, Jeremy  
•
Symeonidis, Michael
•
Noell, Wilfried
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April 20, 2020
Applied Optics

Accurate characterization of high numerical aperture aspheric microlenses currently is a nonstandard procedure that remains an open challenge. Here, we present and discuss a characterization method based on interferometric and point spread function measurements performed in transmission by a high-resolution interferometric microscope. In particular, we show that a single phase measurement performed under fixed testing conditions can be processed in a simple way that yields wavefront aberration as well as surface topography for piano-convex microlenses with arbitrary asphericity. This approach simultaneously allows both fabrication process optimization and optical quality testing for microlenses with different optical functions without heavy modification of the testing setup. For illustration, we present the case of a microlens with a numerical aperture of similar to 0.4. (C) 2020 Optical Society of America

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Type
research article
DOI
10.1364/AO.387346
Web of Science ID

WOS:000528199400012

Author(s)
Beguelin, Jeremy  
•
Symeonidis, Michael
•
Noell, Wilfried
•
Voelkel, Reinhard
•
Scharf, Toralf  
Date Issued

2020-04-20

Publisher

OPTICAL SOC AMER

Published in
Applied Optics
Volume

59

Issue

12

Start page

3601

End page

3607

Subjects

Optics

•

aberrations

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
OPT  
NAM  
Available on Infoscience
May 9, 2020
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/168653
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