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  4. Optimization of Edge Profile for Improved Anti-Resonance Quality Factor in Lithium Niobate SH0 Resonators
 
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conference paper

Optimization of Edge Profile for Improved Anti-Resonance Quality Factor in Lithium Niobate SH0 Resonators

Stettler, Silvan  
•
Villanueva, Luis Guillermo  
January 1, 2022
2022 Ieee International Ultrasonics Symposium (Ieee Ius)
IEEE International Ultrasonics Symposium (IUS)

Thin-film lithium niobate (LNO) has been identified as a promising material platform for enabling high electromechanical coupling and low-loss piezoelectric resonators for filtering applications. In this work, the design and fabrication of fundamental shear horizontal (SH0) mode resonators with a resonance frequency of 1.1 GHz are reported. Initial devices show high losses leading to low quality factor at anti-resonance due to undesired redeposition debris originating from Ion Beam Etching (IBE) of the resonator sidewalls. Methods to improve the quality of the resonator sidewalls and minimize those losses are presented. With those improvements, SHO resonators with high electromechanical coupling (k(eff)(2) = 28%) and impedance ratios larger than 10(4) could be achieved.

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Type
conference paper
DOI
10.1109/IUS54386.2022.9957511
Web of Science ID

WOS:000896080400120

Author(s)
Stettler, Silvan  
•
Villanueva, Luis Guillermo  
Date Issued

2022-01-01

Publisher

IEEE

Publisher place

New York

Published in
2022 Ieee International Ultrasonics Symposium (Ieee Ius)
ISBN of the book

978-1-6654-6657-8

Series title/Series vol.

IEEE International Ultrasonics Symposium

Subjects

Acoustics

•

Engineering, Biomedical

•

Engineering, Electrical & Electronic

•

Radiology, Nuclear Medicine & Medical Imaging

•

Engineering

•

lithium niobate

•

shear horizontal mode resonator

•

plate wave

•

ion beam etching

•

electromechanical coupling

•

mems resonators

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Event nameEvent placeEvent date
IEEE International Ultrasonics Symposium (IUS)

Venice, ITALY

Oct 10-13, 2022

Available on Infoscience
February 13, 2023
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/194732
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