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research article

Taking piezoelectric microsystems from the laboratory to production

Raeder, H.
•
Tyholdt, F.
•
Booij, W.
Show more
2007
Journal of Electroceramics
  • Details
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Type
research article
DOI
10.1007/s10832-007-9036-3
Web of Science ID

WOS:000251795200019

Author(s)
Raeder, H.
Tyholdt, F.
Booij, W.
Calame, F.  
Ostbo, N. P.
Bredesen, R.
Prume, K.
Rijnders, G.
Muralt, P.  
Date Issued

2007

Published in
Journal of Electroceramics
Volume

19

Issue

4

Start page

357

End page

362

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
April 11, 2008
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/20472
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