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  4. Deformable Silicon Membrane for Dynamic Linear Laser Beam Diffuser
 
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conference paper

Deformable Silicon Membrane for Dynamic Linear Laser Beam Diffuser

Masson, Jonathan  
•
Bich, Andreas
•
Herzig, Hans Peter  
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2010
Proceedings of SPIE
MOEMS and Miniaturized Systems IX, Photonics West 2010

We present a dynamic laser beam shaper based on MEMS technology. We show a prototype of a dynamic diffuser made of single crystal silicon. A linearly deformable silicon micromembrane is used to diffuse a laser beam in one dimension. Resonance frequencies of the membrane can range from 1 kHz to 20 kHz. Mode shapes of the deformable mirror are excited using magnetic actuation. Diffusing angle can be tuned by adjusting the driving current in the membrane. We measured a diffusing angle of 1 degrees for an applied current of 40 mA. The aluminum coated mirror can handle 140 W/cm(2) of visible to infrared optical power. Application to smooth out interference pattern generated by a static diffuser is shown.

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Type
conference paper
DOI
10.1117/12.842015
Web of Science ID

WOS:000284996800013

Author(s)
Masson, Jonathan  
•
Bich, Andreas
•
Herzig, Hans Peter  
•
Bitterli, Roland  
•
Noell, Wilfried  
•
Scharf, Toralf  
•
Voelkel, Reinhard
•
Weible, Kenneth J.
Date Issued

2010

Publisher

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa

Published in
Proceedings of SPIE
Series title/Series vol.

Proceedings of SPIE-The International Society for Optical Engineering

Volume

7594

Start page

75940F

Subjects

Dynamic linear diffuser

•

Mirror

•

Membrane

•

Mems

•

System

Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
OPT  
Event nameEvent placeEvent date
MOEMS and Miniaturized Systems IX, Photonics West 2010

San Francisco, USA

January 25-27, 2010

Available on Infoscience
November 11, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/57382
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