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research article

An improved subthreshold swing expression accounting for back-gate bias in FDSOI FETs

Han, Hung-Chi  
•
Jazaeri, Farzan  
•
Zhao, Zhixing
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February 6, 2023
Solid-State Electronics

In a MOSFET transistor, the subthreshold swing defines the switching efficiency, and the associated slope factor, or so-called body factor, is a critical parameter in charge-based models. However, in an advanced Fully -Depleted Silicon-On-Insulator (FDSOI) process, the slope factor is influenced by a strong back gate coupling due to a thin buried oxide (BOX). A conventional constant expression cannot describe the slope factor at various back-gate voltages. Therefore, this paper proposes a general slope factor expression for front-and back-gate transfer characteristics of long-channel FDSOI MOSFETs in a strong gate coupling. The proposed expression is a continuous function of the surface potential difference between the front and back sides, which explains the slope factor behavior versus the back-gate voltage. Besides, the systematic study is presented for the front/back interface states. The proposed model is applied to evaluate the down-scaling of FDSOI technologies in terms of the gate-coupled slope factor. The scaling in the buried oxide layer degrades the front slope factor, which a thinner channel or a reverse body bias can compensate for at the cost of a higher vertical electric field. Compared to the SiO2, the application of high -x dielectric for the buried oxide layer shows a better stand to the degraded slope factor by the interface states.

  • Details
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Type
research article
DOI
10.1016/j.sse.2023.108608
Web of Science ID

WOS:000994226500001

Author(s)
Han, Hung-Chi  
Jazaeri, Farzan  
Zhao, Zhixing
Lehmann, Steffen
Enz, Christian  
Date Issued

2023-02-06

Publisher

PERGAMON-ELSEVIER SCIENCE LTD

Published in
Solid-State Electronics
Volume

202

Article Number

108608

Subjects

Engineering, Electrical & Electronic

•

Physics, Applied

•

Physics, Condensed Matter

•

Engineering

•

Physics

•

double-gate

•

fdsoi

•

gate coupling

•

interface states

•

mosfet

•

subthreshold swing

•

thin-film

•

soi

•

cmos

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

Available on Infoscience
June 19, 2023
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/198322
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