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  4. High-quality factor MEMS based oscillator: Silicon 9 MHz oscillator with low phase noise and high quality factor
 
conference paper

High-quality factor MEMS based oscillator: Silicon 9 MHz oscillator with low phase noise and high quality factor

Conte, F. L.  
•
Grogg, D.
•
Ionescu, A. M.  
Show more
2009
Mixdes 2009: Proceedings Of The 16Th International Conference Mixed Design Of Integrated Circuits And Systems
16th International Conference Mixed Design of Integrated Circuits and Systems

In this paper, an oscillator based on a Vibrating Body Field Effect Transistor (VB-FET) working at 9.4MHz is presented. The electrical characteristics of this active MEM resonator are detailed for static and dynamic operation. The benefit of the intrinsic gain for oscillator design is analyzed and an oscillator design is proposed based on these findings. The reported oscillator performance shows the advantages of an active MEM resonator for the construction of MEM based oscillators with respect to the reduced requirements on the electronics. © 2009 by Department of Microelectronics & Computer Science.

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Type
conference paper
Web of Science ID

WOS:000275900300053

Scopus ID

2-s2.0-72149129450

Author(s)
Conte, F. L.  
Grogg, D.
Ionescu, A. M.  
Kayal, M.  
Date Issued

2009

Publisher

Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa

Published in
Mixdes 2009: Proceedings Of The 16Th International Conference Mixed Design Of Integrated Circuits And Systems
ISBN of the book

978-83-928756-0-4

Start page

276

End page

281

Subjects

Active MEMS

•

Phase noise

•

Resonator

•

Tunable oscillator

•

Tuning fork

Note

Electronic Laboratory, EPFL, 1015 Lausanne, Switzerland Nanoelectronic Devices Laboratory, EPFL, 1015 Lausanne, Switzerland, Export Date: 19 January 2010, Source: Scopus, Art. No.: 5289466, References: Nguyen, C.T.C., MEMS technology for timing and frequency control (2007) Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, 54, pp. 251-270; Nathanson, J.H.C., Wickstrom, R.A., A resonant-gate silicon surface transistor with high-Q band-pass properties (1965) Applied Physics Letters, 7, pp. 84-86; Abele, N., Fritschi, R., Boucart, K., Casset, F., Ancey, P., Ionescu, A.M., Suspended-gate MOSFET: Bringing new MEMS functionality into solid-state MOS transistor (2005) Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International, pp. 479-481; Grogg, D., Mazza, M., Tsamados, D., Ionescu, A.M., Multi-gate Vibrating-body Field Effect Transistors (VB-FETs) (2008) Electron Devices Meeting, 2008. IEDM 2008. IEEE International, pp. 663-666; Nguyen, C.T.C., Howe, R.T., Design and performance of CMOS micromechanical resonator oscillators (1994) Frequency Control Symposium, 1994, pp. 127-134. , 48th, Proceedings of the 1994 IEEE International; Nguyen, C.T.C., Howe, R.T., An integrated CMOS micromechanical resonator high-Q oscillator (1999) Solid-state Circuits, IEEE Journal of, 34, pp. 440-455; Yu-Wei, L., Seungbae, L., Sheng-Shian, L., Yuan, X., Zeying, R., Nguyen, C.T.C., Series-resonant VHF micromechanical resonator reference oscillators (2004) Solid-state Circuits, IEEE Journal of, 39, pp. 2477-2491; Seungbae, L., Nguyen, C.T.C., Influence of automatic level control on micromechanical resonator oscillator phase noise (2003) Frequency Control Symposium and pda Exhibition Jointly with the 17th European Frequency and Time Forum, 2003, pp. 341-349. , proceedings of the 2003 ieee international; Grogg, D., Lo Conte, F., Kayal, M., Ionescu, A.M., 9 MHz vibrating body FET tuning fork oscillator (2009) EFTF-IFCS, , to be presented, Besançon; Grogg, D., Meinen, C., Tsamados, D., Tekin, H.C., Kayal, M., Ionescu, A.M., Double gate movable body micro-electro-mechanical FET as hysteretic switch: Application to data transmission systems (2008) Solid-state Device Research Conference, 2008. ESSDERC 2008. 38th European, pp. 302-305; Blagojevic, M., Pastre, M., Kayal, M., Fazan, P., Okhonin, S., Nagoga, M., Declercq, M., SOI capacitor-less 1-transistor DRAM sensing scheme with automatic reference generation (2004) IEEE Symposium on VLSI Circuits, pp. 182-183. , June; Blagojevic, M., Kayal, M., Pastre, M., Harik, L., Okhonin, S., Fazan, P., Capacitor-less 1T DRAM sensing scheme with automatic reference generation (2006) IEEE Journal of Solid-state Circuits (JSSC), 41, pp. 1463-1470. , June; Pastre, M., Kayal, M., Blanchard, H., A hall sensor analog front end for current measurement with continuous gain calibration (2007) IEEE Sensors Journal, 7 (5), pp. 860-867. , Special Edition on Intelligent Sensors, May; Kaajakari, V., Mattila, T., Oja, A., Seppa, H.A.S.H., Nonlinear limits for single-crystal silicon microresonators (2004) Microelectromechanical Systems, Journal of, 13, pp. 715-724; Kaajakari, V., Koskinen, J.K., Mattila, T., Phase noise in capacitively coupled micromechanical oscillators (2005) Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on, 52, pp. 2322-2331

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
GR-KA  
Event nameEvent placeEvent date
16th International Conference Mixed Design of Integrated Circuits and Systems

Lodz, POLAND

Jun 25-27, 2009

Available on Infoscience
October 21, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/55892
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