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  4. Pyrolysed carbon resonators – Fabrication and characterization
 
conference poster not in proceedings

Pyrolysed carbon resonators – Fabrication and characterization

Amato, Letizia
•
Amato, Bartolo
•
Villanueva, Guillermo  
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2013
39th International Conference on Micro- and Nano- Engineering (MNE), 2013

Study of resonators composed of silicon nitride and pyrolysed carbon.

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Type
conference poster not in proceedings
Author(s)
Amato, Letizia
Amato, Bartolo
Villanueva, Guillermo  
Emnéus, J.
Heiskanen, A.
Keller, S.S.
Boisen, A.
Schmid, S.
Date Issued

2013

Written at

OTHER

EPFL units
NEMS  
Event nameEvent placeEvent date
39th International Conference on Micro- and Nano- Engineering (MNE), 2013

London

September, 2013

Available on Infoscience
March 17, 2016
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/125031
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