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  4. Microcavity light emitting diodes based on GaN membranes grown by molecular beam epitaxy on silicon
 
research article

Microcavity light emitting diodes based on GaN membranes grown by molecular beam epitaxy on silicon

Duboz, J. Y.
•
de L'Isle, N. B.
•
Dua, L.
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2003
Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers

Resonant-cavity InGaN/GaN quantum well light emitting diodes have been fabricated. Nitride layers were grown by molecular beam epitaxy on Si (111). We fabricated the structures using a combination of Si substrate etching, GaN etching and dielectric (Ta2O5/SiO2) mirror deposition. The electroluminescence spectra show that the emission within the distributed Bragg reflector stop band is enhanced in the membrane microcavity. The cavity modes are broadened by some cavity length non-uniformity that is introduced when the GaN is back etched to adjust the cavity length. This process does not need any transfer on an intermediate host substrate and is fully compatible with large area semiconductor processing.

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Type
research article
DOI
10.1143/jjap.42.118
Author(s)
Duboz, J. Y.
de L'Isle, N. B.
Dua, L.
Legagneux, P.
Mosca, M.
Reverchon, J. L.
Damilano, B.
Grandjean, N.  
Semond, F.
Massies, J.
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Date Issued

2003

Published in
Japanese Journal of Applied Physics Part 1-Regular Papers Short Notes & Review Papers
Volume

42

Issue

1

Start page

118

End page

121

Subjects

microcavity

•

light emitting diodes

•

gallium nitride

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dielectric mirror

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molecular beam epitaxy

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membrane

•

LASER

•

SAPPHIRE

•

FILMS

•

WAVE

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
LASPE  
Available on Infoscience
October 5, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/54992
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