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  4. Nitrogen incorporation at Si(001)-SiO2 interfaces: Relation between N 1s core-level shifts and microscopic structure
 
research article

Nitrogen incorporation at Si(001)-SiO2 interfaces: Relation between N 1s core-level shifts and microscopic structure

Rignanese, G. M.
•
Pasquarello, Alfredo  
•
Charlier, J. C.
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1997
Physical Review Letters

Using a first-principles approach, we study the incorporation of nitrogen at the Si(001)-SiO2 interface by calculating N Is core-level shifts for several relaxed interface models. The unusually large shift with oxide thickness of the principal peak in photoemission spectra is explained in terms of a single first-neighbor configuration in which the N atom Is always bonded to three Si atoms, both in the interfacial region and further in the oxide. Core-hole relaxation and second nearest neighbor effects concur in yielding larger binding energies in the oxide than at the interface. The calculations do not support the occurrence of N-O bonds at nitrided Si(001)-SiO2 interfaces.

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Type
research article
DOI
10.1103/PhysRevLett.79.5174
Author(s)
Rignanese, G. M.
Pasquarello, Alfredo  
Charlier, J. C.
Gonze, X.
Car, R.
Date Issued

1997

Published in
Physical Review Letters
Volume

79

Issue

25

Start page

5174

End page

5177

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
CSEA  
Available on Infoscience
October 8, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/43387
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