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research article

ESCA Investigation of SnOx Films Used as Gas Sensors

Sanjines, R.
•
Rosenfeld, D.
•
Gozzo, F.
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1994
Surface and Interface Analysis

The electronic properties of amorphous and ion-implanted polycrystalline SnO2 films have been studied using x-ray photoemission spectromicroscopy. First, we analysed the degree of oxidation and the homogeneity of as-deposited films. The SnO and SnO2 phases were identified from their valence band spectra rather than from the Sn 3d core level spectra. Then we studied the damage effects due to the implantation of Pd+ and Ga+ ions in polycrystalline films. The ion bombardment of SnO2 films results in drastic changes of valence-band spectra which is correlated to compositional changes. Annealing in air at 600-degrees-C for 4 leads to complete recovery of radiation damage. However, after such thermal annealings, the film surface still contains a relatively high amount of SnO (5-10%).

  • Details
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Type
research article
DOI
10.1002/sia.740220181
Web of Science ID

WOS:A1994PG62100080

Author(s)
Sanjines, R.
Rosenfeld, D.
Gozzo, F.
Almeras, P.
Perez, L.
Levy, F.
Margaritondo, G.  
Schreiner, W. H.
Date Issued

1994

Published in
Surface and Interface Analysis
Volume

22

Issue

1-12

Start page

372

End page

375

Subjects

POLYCRYSTALLINE TIN

•

THIN-FILMS

•

OXIDATION

•

SPECTRA

•

OXIDES

Note

Ufrgs,inst fis,br-91500 poflo alegre,brazil. Sanjines, r, epfl,inst phys,ch-1015 lausanne,switzerland.

ISI Document Delivery No.: PG621

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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LSE  
LPRX  
Available on Infoscience
October 3, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/234649
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