research article
Fabrication of an Integrated Silicon-Based Lens for Low-Energy Miniaturized Electron Columns
Type
research article
Author(s)
Date Issued
1996
Published in
Volume
35
Issue
12B
Start page
6641
End page
6647
Note
148
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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